Filters, PUMPGARD™IILieferant: Entegris
ENTEWDPM0CPSFEA 0 EURENTEWDPM0CPSF ENTEWDPM0CP0F ENTEWDPM0CP4F
PUMPGARD™II filters protect chemicals and final filters against damage from broken silicone wafer pieces.
- Large pore size
- Fluro polymer resin construction
- Compact design
These filters provide excellent compatibility with most acids, bases and non flammable solvents used in wet stations. The 60 µm retention rating of these filters are ideal to capture larger wafer pieces before they reach the pump or final filter.
These filters installed on the upstream side of the recirculation pumps can remove shards from process chemical baths before damage to expensive chemical pumps occurs.
Filtration area - 23 cm².
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